Lateral porous silicon interferometric transducer for on-chip flow-through sensing applications

Most porous silicon-based interferometric sensors targeting biosensing applications consist of vertical silicon layers created into a wafer by electrochemical anodization and operate in flow-over configuration. In this work, we present an alternative interferometer based on with horizontally oriented pores. This architecture permits the integration flow-through membranes within planar microfluidics. Fourier-transform infrared spectroscopy was used to obtain interference spectra from fabricated lateral red shifts were observed upon filling microfluidic chips integrating solvents higher optical indices. work proves that are typical Fabry-Pérot interferometers sensitivity more than 150 nm/RIU limit detection less 10−3 RIU, is comparable layers. Moreover, have conducted simulation studies showing addition Bragg mirrors results narrower fringes improved performances. After appropriate biofunctionalization surface, membrane should offer solutions for development biosensors monolithically integrated on-chip.